E2244-02 - Standard Test Method for In-Plane Length Measurements of Thin, Reflecting Films Using an Optical Interferometer
Description: This test method covers a procedure for measuring in-plane lengths (including deflections) of patterned thin films. It applies only to films, such as found in microelectromechanical systems (MEMS) materials, which can be imaged using an interferometer.
Category: ASTM International Standards Specifications
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