E2246-02 - Standard Test Method for Strain Gradient Measurements of Thin, Reflecting Films Using an Optical Interferometer
Description: This test method covers a procedure for measuring the strain gradient in thin, reflecting films. It applies only to films, such as found in microelectromechanical systems (MEMS) materials, which can be imaged using an interferometer. Measurements from cantilevers that are touching the underlying layer are not accepted.
Category: ASTM International Standards Specifications
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