Direct Fabrication of Ferroelectric Piezoelectric Structures

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Direct Fabrication of Ferroelectric Piezoelectric Structures

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Engineers Edge - The technique, which uses a heated atomic force microscope (AFM) tip to produce patterns, could facilitate high-density, low-cost production of complex ferroelectric structures for energy harvesting arrays, sensors and actuators in nano-electromechanical systems (NEMS) and micro-electromechanical systems (MEMS). The research was reported July 15 in the journal Advanced Materials.

“We can directly create piezoelectric materials of the shape we want, where we want them, on flexible substrates for use in energy harvesting and other applications,” said Nazanin Bassiri-Gharb, co-author of the paper and an assistant professor in the School of Mechanical Engineering at the Georgia Institute of Technology. “This is the first time that structures like these have been directly grown with a CMOS-compatible process at such a small resolution. Not only have we been able to grow these ferroelectric structures at low substrate temperatures, but we have also been able to pattern them at very small scales.”

The research was sponsored by the National Science Foundation and the U.S. Department of Energy. In addition to the Georgia Tech researchers, the work also involved scientists from the University of Illinois Urbana-Champaign and the University of Nebraska Lincoln.

Modified from materials provided by Georgia Institute of Technology.

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